Author

Viktor Antoniuk

National Technical University of Ukraine“Igor Sikorsky Kyiv Polytechnic Institute”

03056, 37 Beresteiskyi Ave., Kyiv, Ukraine

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open access

Keywords: microgeometry; dielectric material; microelectronics; nanoelectronics; atomic-force microscopy

Features of microgeometry response and surface properties of dielectric materials for micro- and nanoelectronics

S. Petrenko, А. Novakovskii, Viktor Antoniuk, Yuliia Bondarenko

https://doi.org/10.24025/2306-4412.1.2018.153265

Suggested citation

Petrenko, S., Novakovskii, O., Antoniuk, V., & Bondarenko, Yu. (2018). Features of microgeometry response and surface properties of dielectric materials for micro- and nanoelectronics . Bulletin of Cherkasy State Technological University, 23(1), 5-13. https://doi.org/10.24025/2306-4412.1.2018.153265
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  • 10.03.2018
  • 1,063 Views
  • Library Science. Record Studies. Informology - Volume 23, No. 1, 2018
open access

Keywords: optical glass, optical glass plates, microlens raster elements of integrated optics, micro-defects, defective layer, electron beam processing, electron microscopy, atomic force microscopy

The method for detection of micro-defects and defective layer in the surface of optical glass plates using electron beam processing method

Georgii Kanashevych, Mykola Holub, Sergiy Matsepa, Viktor Antoniuk

Suggested citation

Kanashevych, G., Holub, M., Matsepa, S., & Antoniuk, V. (2017). The method for detection of micro-defects and defective layer in the surface of optical glass plates using electron beam processing method. Bulletin of Cherkasy State Technological University, 22(2), 105-109.
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  • 723 Views
  • Library Science. Record Studies. Informology - Volume 22, No. 1, 2017
open access

Keywords: piezoelectric actuators; micromanipulators; CNC machines; positioning accuracy; piezoelectric transducers

Applications of piezoelectric actuators in micromanipulators

А. Novakovskii, Viktor Antoniuk, S. Petrenko

Suggested citation

Novakovskii, O., Antoniuk, V., & Petrenko, S. (2017). Applications of piezoelectric actuators in micromanipulators. Bulletin of Cherkasy State Technological University, 22(4), 5-10.
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  • 744 Views
  • Library Science. Record Studies. Informology - Volume 22, No. 4, 2017