Journal: Volume 22, No. 4, 2017
Pages: 5 – 10
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Applications of piezoelectric actuators in micromanipulators

А. Novakovskii, Viktor Antoniuk, S. Petrenko

Abstract

In the article features of the use of piezoelectric actuators in micromanipulative systems for carrying out displacements at micron level are considered. The purpose of this article is to analyze the application areas of piezoelectric actuators in micromanipulative systems with further recommendations regarding the application of these systems to provide movement with varying degrees of freedom, which guarantees minimum errors in such displacements. The analysis of the application of piezoelectric actuators in micromanipulative systems of various areas of human activity has been carried out. The effectiveness of using piezoelectric actuators in microsurgery and biology is shown. It has been established that the direction of the use of actuators in micromanipulative systems of CNC machines is promising to ensure the movements in all necessary degrees of freedom with minimal errors

Keywords

piezoelectric actuators; micromanipulators; CNC machines; positioning accuracy; piezoelectric transducers

References

  1. Bobtsov, A. A., Boikov, V. I., Bystrov, S. V. Grigorev, V. V. (2011) Implementing devices and systems for micromovements. SPb.: SPbGU ITMO, 131 p.
  2. Antoniuk, V. S., Belova, A. V. Petrenko, S. F. (2008) Improved positioning accuracy of linear guiding micromanipulation systems with piezoelectric motor. Vysoki tehnolohiyi v mashynobuduvanni: collection of scientific works. Kharkiv: NTU “KhPI”, v. 2 (17), pp. 12–20.
  3. Piezoelectric actuators lamellar bending type. URL: http://www.elpapiezo.ru/curve.shtml (15.10.2017). 
  4. Tan, U. X., Latt, W. T., Shee, C. Y., Ang, W.T. (2011) A low-cost flexure-based handheld mechanism for micromanipulation. IEEE ASME Trans. Mechatronics, iss. 4, pp. 773–778.
  5. Choi, D., Riviere, C. (2005) Flexure-based manipulator for active handheld microsurgical instrument. Proc. 27th Annu. Int. Conf. IEEE Eng. Med. Biol. Soc, iss. 5, pp. 5085– 5088.
  6. Sungwook, Y., MacLachlan, R. A. Riviere, C. N. (2015) Manipulator design and operation for a six-degree-of-freedom handheld tremor-canceling microsurgical instrument. IEEE ASME Trans. Mechatron, v. 20 (2), pp. 761–772.
  7. Bardin, V. A., Vasilev, V. A., Chernov, P. S. (2014) Influence of internal destabilizing factors on piezoactuators and nano- and micropositional systems. Universitetskoye obrazovaniye (MKUO-2014): XVIII Internat. sci. method. conf. (Penza, Аpril 10-11, 2014). Penza: PSU, 584 p.
  8. Fleming, A. J. (2013) A review of nanometer resolution position sensors: operation and performance. Sensors and Actuators A, № 190, pp. 106–126.
  9. Bardin, V.A., Vasiliev, V. A., Chernov, P. S. (2015) Principles of construction and prospect of research of piezoelectric actuators for nano- and micropositioning. Nano i mikrosistemnaya tehnika. Мoscow: Novyye tehnologiyi, iss. 1, pp. 90–93.
  10. Ramadan, A., Inoue, K., Arai, T. Takubo, T. (2008) New architecture of a hybrid twofingered micro-nano manipulator hand: optimization and design. Adv. Robot, v. 2, iss. 2–3, pp. 235–260.
  11. Ryabtsov, A. V. (2013) Special types of piezoelectric actuators for optical switching devices. Visnyk DUIKT, iss.1, pp. 53–57.
  12. Аntonjuk, V. S., Pryhodko, A. V. (2012) To study how micromanipulation system work at the nanoscale. Visnyk NTUU "KPI", v. 44, pp. 5–15.
  13. Lanin, V. Turtsevich, A., Kerentsev, A. (2008) Dosing of solder in the automated installation of crystals of semiconducting devices. Komponenty i tehnologiyi, iss. 11, pp. 154–158.
  14. Amelchenko, A. G., Bardin, V. A. Vasiliev V. A. (2015) Control systems and elements of a reinforcing piezoelectric actuator for precision positioning. Izvestiya vysshyh uchebnyh zavedenuu. Povolzhskii region. Tehnicheskiye nauki, iss. 3 (35), pp. 111– 124. 
  15. Fleming, M. B., Hutley, M. C. (1997) Blazed diffractive optics. Appl. Opt., iss. 36, pp. 4635–4643.
  16. Bondarenko, M., Bondarenko, I. (2016) Power supply method of micro- and nanosystem engineering devices. Energy Challenges & Mechanics: 6th Internat. Symp. (Inverness, August 14-18, 2016). Inverness, Scotland, UK, pp. 245–246.
  17. Kanashevich, G. V., Bondarenko, M. O. (1998) Modern variants of connections of fiber optic communication lines. Visnyk Cherkaskogo derzhavnogo tehnologichnogo universitetu. Seria: Tehnichni nauky: collection of scientific works. Cherkasy: ChITI, iss. 3, pp. 56–62.
  18. Bardin, V. A., Vasil'ev, V. A. (2013) Principles of constructing piezoactuators for nano- and microspaces. Opto-, nanoelektronika, nanotehnologiyi i mikrosistemy: proc. of XVI Internat. conf. Ulyanovsk: USU, pp. 316–317.
  19. Status of the MEMS industry 2016 Edition. Sample of the analysis – 2016, Lyon, France: Yole Development SARL.

Suggested citation

Novakovskii, O., Antoniuk, V., & Petrenko, S. (2017). Applications of piezoelectric actuators in micromanipulators. Bulletin of Cherkasy State Technological University, 22(4), 5-10.