Author

А. Novakovskii

National Technical University of Ukraine“Igor Sikorsky Kyiv Polytechnic Institute”

03056, 37 Beresteiskyi Ave., Kyiv, Ukraine

All articles

open access

Keywords: microgeometry; dielectric material; microelectronics; nanoelectronics; atomic-force microscopy

Features of microgeometry response and surface properties of dielectric materials for micro- and nanoelectronics

S. Petrenko, А. Novakovskii, Viktor Antoniuk, Yuliia Bondarenko

https://doi.org/10.24025/2306-4412.1.2018.153265

Suggested citation

Petrenko, S., Novakovskii, O., Antoniuk, V., & Bondarenko, Yu. (2018). Features of microgeometry response and surface properties of dielectric materials for micro- and nanoelectronics . Bulletin of Cherkasy State Technological University, 23(1), 5-13. https://doi.org/10.24025/2306-4412.1.2018.153265
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  • 10.03.2018
  • 1,071 Views
  • Library Science. Record Studies. Informology - Volume 23, No. 1, 2018
open access

Keywords: piezoelectric actuators; micromanipulators; CNC machines; positioning accuracy; piezoelectric transducers

Applications of piezoelectric actuators in micromanipulators

А. Novakovskii, Viktor Antoniuk, S. Petrenko

Suggested citation

Novakovskii, O., Antoniuk, V., & Petrenko, S. (2017). Applications of piezoelectric actuators in micromanipulators. Bulletin of Cherkasy State Technological University, 22(4), 5-10.
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  • 747 Views
  • Library Science. Record Studies. Informology - Volume 22, No. 4, 2017