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The method for detection of micro-defects and defective layer in the surface of optical glass plates using electron beam processing method

Georgii Kanashevych, Mykola Holub, Sergiy Matsepa, Viktor Antoniuk

Abstract

The technique can detect micro-defects and defective layer on plates made of optical glass K8, STK3, BK10, TK21 obtained in terms of optical manufacturing and the surface of which is further used for producing single microlenses, microlens raster elements of integrated optics, single and systems of micromirrors using microelectronics technology. According to the developed method micro-defects and defective layer on the surface of the plate are revealed by electron flow effect on the surface, further etching in a mixture of HF + glycerin and application of optical, electron and atomic force microscopy. The action of electron flow provides the dissociation of polishing products that fill a defective layer of the plate and increases their solubility in a mixture of HF and glycerol

Keywords:

optical glass, optical glass plates, microlens raster elements of integrated optics, micro-defects, defective layer, electron beam processing, electron microscopy, atomic force microscopy

Retrieved from Volume 22, No. 1, 2017

Pages 105-109

References Suggested citation

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Suggested citation

Kanashevych, G., Holub, M., Matsepa, S., & Antoniuk, V. (2017). The method for detection of micro-defects and defective layer in the surface of optical glass plates using electron beam processing method. Bulletin of Cherkasy State Technological University, 22(2), 105-109.