Journal: Volume 22, No. 4, 2017
Pages: 99 – 104
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Technical, technological conditions and techno-economic criteria of electron-beam microprocessing of optical products of small sizes

Mykola Holub, Serhii Bryk, Vadym Harasiuta, Volodymyr Savchenko, Oleh Sandyha

Abstract

The article presents the technical, technological conditions and techno-economic criteria of electron-beam microprocessing of optical products of small sizes (up to 1 · 10-3 m). The linear dimensions and temperature modes of the cathode can determine the requirements for energy sources, electron beam gun, preheating and cooling systems, power control systems for electronic flow, and thus optimize the modes of electron beam microprocessing of small size products. The heating source must be mobile and provide local heating of the surface of the optical material with an accuracy of 0.5%, and the regulated parameters must vary within 2... 4 orders

Keywords

electronic flow; electron beam processing (microprocessing); optical glass; glass surface layer; microoptics; integral optics; МОМS; MОEMS

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Suggested citation

Holub, M., Bryk, S., Harasiuta, V. , Savchenko, V., & Sandyha, О. (2017). Technical, technological conditions and techno-economic criteria of electron-beam microprocessing of optical products of small sizes. Bulletin of Cherkasy State Technological University, 22(4), 99-104.