Author

Volodymyr Savchenko

Master

Cherkasy State Technological University

18006, 460 Shevchenko Blvd., Cherkasy, Ukraine

All articles

open access

Keywords: electronic flow; electron beam processing (microprocessing); optical glass; glass surface layer; microoptics; integral optics; МОМS; MОEMS

Technical, technological conditions and techno-economic criteria of electron-beam microprocessing of optical products of small sizes

Mykola Holub, Serhii Bryk, Vadym Harasiuta, Volodymyr Savchenko, Oleh Sandyha

Suggested citation

Holub, M., Bryk, S., Harasiuta, V. , Savchenko, V., & Sandyha, О. (2017). Technical, technological conditions and techno-economic criteria of electron-beam microprocessing of optical products of small sizes. Bulletin of Cherkasy State Technological University, 22(4), 99-104.
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  • Library Science. Record Studies. Informology - Volume 22, No. 4, 2017