Improvement of the quality of optical surfaces of the element base of information systems by the method of electron-beam microprocessing
Sergiy Matsepa, Georgii Kanashevych, Yuriy Kovalenko, Roman Tsynda, Ihor Zhayvoronok
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https://doi.org/10.24025/2306-4412.4.2021.244832
Suggested citation
Matsepa, S., Kanashevych, G., Kovalenko, Y., Tsynda, R., & Zhayvoronok, I.
(2021).
Improvement of the quality of optical surfaces of the element base of information systems by the method of electron-beam microprocessing.
Bulletin of Cherkasy State Technological University,
26(4),
35-44.
https://doi.org/10.24025/2306-4412.4.2021.244832
- 20.12.2021
- 998 Views
- Library Science. Record Studies. Informology - Volume 26, No. 4, 2021