Author

V. Medianyk

Cherkasy State Technological University

18006, 460 Shevchenko Blvd., Cherkasy, Ukraine

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open access

Keywords: microelectromechanical structures; atomic force microscopy; surface microroughness; microdefects

The study of microelectromechanical piezoelectric structures by the method of atomic force microscopy

Constantine Bazilo, Svitlana Bilokin, Maksym Bondarenko, V. Medianyk

https://doi.org/10.24025/2306-4412.3.2018.162704

Suggested citation

Bazilo, C., Bilokin, S., Bondarenko, M., & Medianyk, V. (2018). The study of microelectromechanical piezoelectric structures by the method of atomic force microscopy . Bulletin of Cherkasy State Technological University, 23(3), 21-26. https://doi.org/10.24025/2306-4412.3.2018.162704
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  • 15.09.2018
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  • Library Science. Record Studies. Informology - Volume 23, No. 3, 2018