Open access

Features of microgeometry response and surface properties of dielectric materials for micro- and nanoelectronics

10.03.2018

Authors:

S. Petrenko, А. Novakovskii, Viktor Antoniuk, Yuliia Bondarenko

DOI: https://doi.org/10.24025/2306-4412.1.2018.153265

Open access

The method for detection of micro-defects and defective layer in the surface of optical glass plates using electron beam processing method

Authors:

Georgii Kanashevych, Mykola Holub, Sergiy Matsepa, Viktor Antoniuk

Open access

Applications of piezoelectric actuators in micromanipulators

Authors:

А. Novakovskii, Viktor Antoniuk, S. Petrenko